Smart package

ABSTRACT

A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.16/271,339, filed Feb. 8, 2019, which is a continuation of U.S. patentapplication Ser. No. 15/549,875, filed Aug. 9, 2017. U.S. patentapplication Ser. No. 15/549,875 is a National Stage application ofInternational Patent Application No. PCT/US2016/017642, filed Feb. 12,2016; which claims the benefit of priority under the provisions of 35U.S.C. § 119 of U.S. Provisional Patent Application No. 62/115,569 filedFeb. 12, 2015 in the names of Joseph D. Sweeney, et al. for “SMARTPACKAGE”. The disclosures of U.S. Provisional Patent Application No.62/115,569 U.S. Patent Application No. 15/549,875, and U.S. PatentApplication No. 16,271,339 are incorporated by reference herein in theirentireties, for all purposes.

FIELD

The present disclosure relates to a fluid supply packages for storageand dispensing of fluid, e.g., fluid having utility in the manufactureof semiconductor products, flat-panel displays, and solar panels, and toprocess tool assemblies comprising such packages, in which the fluidsupply packages are informationally augmented, as “smart” packages.

DESCRIPTION OF THE RELATED ART

In the use of fluid supply packages, such as those in the aforementionedapplications of manufacturing semiconductor products, flat-paneldisplays, and solar panels, it is desirable to manage the installationand operation of such packages at a high level of efficiency. Anyexcessive time requirement for installation of the fluid supply packagein a fluid-utilizing facility to provide fluid to a recipient toolentails a severe economic penalty, as do fluid management issuesassociated with such packages, such as the failure to make neededadjustments of process tool settings when a fluid supply package ischanged to introduce a new fluid, or the installation of a wrong type offluid package for the desired process operation.

In consequence, the art continues to seek improvements in fluid supplypackages and in the processes utilized therewith, to avoid such fluidsupply package installation and operating issues.

SUMMARY

The present disclosure relates to fluid supply packages for storage anddelivery of fluids, and process tool assemblies comprising suchpackages, in which the fluid supply packages are informationallyaugmented.

In one aspect, the disclosure relates to a fluid supply package,comprising a fluid storage and dispensing vessel, and a fluid dispensingassembly coupled to the vessel and configured to enable discharge offluid from the vessel under dispensing conditions, wherein the fluidsupply package comprises an informational augmentation device thereon,e.g., a quick read (QR) code and/or a radio-frequency identification(RFID) tag, for informational augmentation of the package.

In another aspect, the disclosure relates to a fluid supply kit,comprising a fluid supply package of the present disclosure, asvariously described herein, and a machine reader configured to read theinformational augmentation device.

In a further aspect, the disclosure relates to a process systemcomprising at least one fluid supply package of the present disclosure,as variously described herein, and a fluid-utilizing process toolconfigured to receive fluid from the at least one fluid supply packageunder the dispensing conditions.

A further aspect of the disclosure relates to a method of enhancingoperation of a process tool receiving fluid from a fluid source foroperation of the tool in a process system, said method comprisinginformationally augmenting the process system by supplying fluid from atleast one fluid supply package as variously described herein.

Other aspects, features and embodiments of the disclosure will be morefully apparent from the ensuing description and appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic representation of an ion implantation systemutilizing informationally augmented fluid supply packages and aninformationally augmented ion implanter process tool, according to oneembodiment of the present disclosure.

FIG. 2 is a process system including an informationally augmented fluidsupply package configured for delivery of gas, in accordance withanother embodiment of the present disclosure.

DETAILED DESCRIPTION

The present disclosure relates to informationally augmented fluid supplypackages that may be utilized in process tool assemblies to achievecorresponding informationally augmented operation.

Such fluid supply packages comprise a fluid storage vessel in whichfluid is stored for subsequent dispensing, and a fluid dispensingassembly coupled to the vessel and configured to enable discharge offluid from the vessel under dispensing conditions.

In specific embodiments, the fluid supply package may comprise a storagemedium in the interior volume of the vessel, as adapted to retain thefluid in a stored state under storage conditions, and to release thefluid for discharge from the vessel under dispensing conditions. Thestorage medium may be of any suitable type, and may for example comprisea solid-phase physical adsorbent, e.g., carbon adsorbent, zeolite,molecular sieve adsorbent, metal organic framework (MOF), aerogel,alumina, silica, aluminosilicate, porous metal oxide, or other poroussolid adsorbent on which the fluid is reversibly adsorbable, withrelease of the fluid from the adsorbent being effected by application ofheat, vacuum or other pressure differential, imposition of aconcentration gradient by flow of a carrier fluid through the interiorvolume of the vessel to achieve concentration gradient-mediateddesorption of the fluid and entrainment of the desorbed fluid in thecarrier fluid, or a combination of two or more of such fluid releasemodalities, or other techniques for effecting disengagement of the fluidfrom the adsorbent on which it is stored.

Alternatively, the storage medium may comprise a liquid in which thefluid is reversibly dissolved or otherwise retained in the liquidstorage medium, as for example an ionic liquid storage medium, in whichthe fluid is reversibly reacted with the ionic liquid for storage as areaction product, with the reverse reaction being carried out underdispensing conditions to release the fluid for discharge from the vesselholding the ionic liquid.

Adsorbent-based fluid supply packages of the foregoing type, in whichcarbon adsorbent is employed as a fluid storage medium, are commerciallyavailable from Entegris Corporation (Billerica, Mass., USA) under thetrademark SDS.

The fluid supply package in other embodiments may utilize vessels thatcontain one or more pressure regulators disposed in the interior volumeof the vessel, in which the regulators are arranged with appropriate setpoint configurations, to effect dispensing of fluid at the set point ofthe regulator device, in response to pressure in dispensing flowcircuitry connected to the fluid supply package, which is below thepressure set point of the single or final downstream regulator in thevessel of the fluid supply package.

Pressure-regulated fluid supply packages of such type are commerciallyavailable from Entegris Corporation (Billerica, Mass., USA) under thetrademark VAC.

Other fluid supply packages that may be employed in the broad practiceof the present disclosure include fluid supply packages in which a fluidsupply vessel contains a capillary type flow restricting devicepositioned upstream of a regulator, vacuum actuated check valve, orother flow modulating device in the interior volume of the fluid supplyvessel.

More generally, fluid supply packages of the present disclosure may beof any suitable configuration that is effective to contain the fluidduring storage and transport conditions, and to discharge fluid from thefluid supply package under dispensing conditions. The dispensingconditions may be accommodated by actuating the fluid dispensingassembly to effect dispensing, e.g., by opening of a valve in a valvehead of the fluid dispensing assembly of the package.

As used herein, and in the appended claims, the singular forms “a”,“and”, and “the” include plural referents unless the context clearlydictates otherwise.

As used herein, the term “fluid” is intended to be broadly construed toinclude gases, vapors, liquids, and combinations and mixtures of theforegoing, within the scope of such term.

The fluid supply packages, process systems, and process tool assembliesdisclosed herein may comprise, consist, or consist essentially of any ofthe specific parts, components, and structures illustratively describedherein. The disclosure further contemplates restrictively defined fluidsupply packages, process systems, and process tool assemblies, e.g.,wherein one or more of the specifically described parts, components, andstructures may be specifically omitted, in defining operativeembodiments of the present disclosure.

In one aspect, the present disclosure relates to a fluid supply package,comprising a fluid storage and dispensing vessel, and a fluid dispensingassembly coupled to the vessel and configured to enable discharge offluid from the vessel under dispensing conditions, wherein the fluidsupply package comprises an informational augmentation device thereon,e.g., at least one of a quick read (QR) code and a radio-frequencyidentification (RFID) tag, for informational augmentation of thepackage.

RFID tags useful for such purpose may be of any suitable type, and mayfor example be any one of: an active reader passive tag (ARPT); apassive reader active tag (PRAT); or an active reader active tag (ARAT).

Thus, by way of illustration, the fluid supply package in variousembodiments may comprise a quick read (QR) code thereon, or an RFID tagthereon, or both a quick read (QR) code and an RFID tag thereon.

More generally, the fluid supply package may comprise any otherinformational augmentation device or devices. As used herein, the term“informational augmentation device” means a device, including hardwareand/or software, that is effective to directly and/or indirectly provideinformation relevant to the fluid supply package and/or its use, whereinthe information is accessible by or with the aid of a machine. Theinformational augmentation device may for example include theaforementioned quick read (QR) codes, RFID tags, transponder devices,encoding devices, proximity cards, proximity badges, wirelesscommunication devices, and combinations of any two or more of suchdevices. The informational augmentation device may comprise storedinformation in a component, subassembly, integrated circuit, or storagemedium of the device, and such information may be coded or encrypted forsecurity or other purposes.

The vessel in the fluid supply package may contain a storage medium thatis adapted to retain fluid in a stored state under storage conditions,and to release the fluid for discharge from the vessel under dispensingconditions, e.g., a physical adsorbent material, such as carbonadsorbent. The storage medium in other embodiments may comprise aliquid, such as an ionic liquid.

The vessel in the fluid supply package in other embodiments may containat least one interiorly disposed pressure regulator therein, configuredto dispense fluid from the vessel to the fluid dispensing assembly atpressure determined by a set point of the pressure regulator. The vesselthus may contain one interiorly disposed pressure regulator therein, oralternatively, the vessel may contain multiple serially-arrangedpressure regulators.

The fluid supply package may be constructed and arranged, to hold anysuitable fluid. The fluid supply package may for example hold a fluiduseful in the manufacture of at least one of semiconductor products,flat-panel displays, solar panels, LEDs, LED displays, and components,subassemblies, and portions of such products.

The fluid supply package in various embodiments may be configured withan informational augmentation device, e.g., a quick read (QR) code, thatis readable by a machine reader, e.g., a QR code reader, to initiateaccession of a website, display of a webpage, transmission of an email,or other telecommunication action providing information related to thefluid supply package, a fluid packaged therein, or use of the fluidsupply package or fluid.

In other embodiments, the fluid supply package may be configured with anRFID tag that contains information related to the fluid supply package,a fluid packaged therein, or use of the fluid supply package or fluid.The RFID tag may be of a read/write character, and may have informationstorage capability as well as information transmission capability.

For example, the RFID tag may be a thermally-resistive RFID device thatis effective to provide an output indicative of temperature of fluid inthe fluid supply package. In instances where fluid is desirably storedat subatmospheric pressure, a fluid temperature readout from thethermally-resistive RFID device can be utilized to determine whetherfluid in the vessel of the package is at the desired subatmosphericpressure condition, or whether temperature condition (thermal exposure)of the vessel has caused pressure to rise above a subatmosphericpressure level.

Thus, where the fluid storage and dispensing vessel of the packagecontains a physical adsorbent that desirably has the fluid adsorbedthereon to achieve subatmospheric pressure within the vessel,temperature excursions from desired baseline conditions may result inheating of the adsorbent, and desorption of the fluid from theadsorbent, thereby causing the pressure in the vessel to increase abovethe desired subatmospheric or other target pressure level of fluidstorage. This in turn can be disadvantageous, if the fluid supplypackage is installed and a valve in the fluid dispensing assembly isopened, with a sudden efflux of high-pressure gas rather than thesubatmospheric pressure fluid dispensing that is desired.

As another example, the fluid supply package may be constituted with anoverpack enclosing the fluid storage and dispensing vessel, or with anoverpack enclosing the vessel as well as the associated fluid dispensingassembly, so that the overpack arrangement serves to provide a thermallyinsulated environment for the fluid in the vessel of the package. Forsuch purpose, the overpack may comprise a coolant medium and/or thermalinsulation within the overpack housing or containment structure. In suchinstance, the ability to obtain a temperature reading from thethermally-resistive RFID device can be utilized to determine whether theoverpack should be removed from the vessel and dispensing assembly, orwhether the package should be subjected to refrigeration or othertemperature adjustment process to achieve the desired temperature offluid in the vessel.

The fluid supply package as variously described above may furthercomprise an interlock structure configured to preclude fluid dispensingfrom the fluid storage and dispensing vessel unless unlocked by anunlocking signal requiring for its generation information from theinformational augmentation device. For example, the interlock structuremay be unlockable by an unlocking signal requiring for its generationinformation from an informational augmentation device such as a quickread (QR) code and/or an RFID tag, where the fluid supply package isconfigured to include such informational augmentation devices. In suchmanner, the generation of unlocking signals using information from theinformational augmentation device may be employed as a requisite for thedesired operation involving fluid from the fluid supply package.

The disclosure in another aspect relates to a fluid supply kit,comprising a fluid supply package of the present disclosure, asvariously described herein, and a machine reader configured to readinformation from the informational augmentation device. The fluid supplykit may be configured with the machine reader comprising a smart phone,tablet, or smart watch configured to read the informational augmentationdevice of the fluid supply package, e.g., at least one of a quick read(QR) code and an RFID tag, where the fluid supply packages configuredwith such informational augmentation devices.

In another aspect, the disclosure relates to a process system comprisingat least one fluid supply package of the present disclosure, asvariously described herein, and a fluid-utilizing process toolconfigured to receive fluid from the at least one fluid supply packageunder the dispensing conditions.

Such process system may be constituted, with the process tool includingat least one communicational device that is communicationallyinteractive with the informational augmentation device of the fluidsupply package, such as at least one of a quick read (QR) code and anRFID tag on the fluid supply package, for enabling operation of theprocess tool. For example, the process system may be constituted, suchthat the process tool is not operationally competent untilcommunicational interaction of the process tool communicational devicewith the informational augmentation device on the fluid supply packagesatisfies a predetermined operational communication protocol.

The predetermined operational communication protocol may for examplecomprise verification of identity of the fluid supply package from fluidsupply package information contained in the informational augmentationdevice, e.g., an RFID tag, on the fluid supply package. The fluid supplypackage information may comprise identity of fluid that is contained inthe fluid supply package, process tool operating settings, processprotocols for fluid in the fluid supply package, information relating tothe installation of the fluid supply package of the process system forsupplying fluid to the process tool, or any other suitable information.

The process tool in such process system may be of any suitable type, andmay for example comprise an ion implantation process tool, a chemicalvapor deposition process tool, an etching tool, or other suitable tool.

The process system may be constituted with a process tool that comprisesa tool adapted for manufacture of at least one of semiconductorproducts, flat-panel displays, solar panels, LEDs, LED displays, andcomponents, subassemblies, and portions of such products.

The process system in various embodiments may comprise multiple fluidsupply packages. In some embodiments, the process system may comprise atleast one fluid supply package in which the fluid supply packagecomprises a vessel containing physical adsorbent on which fluid isadsorbed at subatmospheric pressure, and in which the fluid supplypackage(s) are contained in a gas box that is ventilated withventilation gas, with the process tool including at least onecommunicational device that is communicationally interactive with theinformational augmentation device, e.g., at least one of a quick read(QR) code and an RFID tag on the fluid supply package, with theinformational augmentation device on the fluid supply package comprisinginformation indicative of subatmospheric pressure in the fluid supplypackage vessel, and with the at least one communicational device beingconfigured to receive the subatmospheric pressure information and tooutput a control signal for controllably adjusting ventilation gas flowrate through the gas box in response to the subatmospheric pressure ofthe fluid in the fluid supply package.

A further aspect of the disclosure relates to a method of enhancingoperation of a process tool receiving fluid from a fluid source foroperation of the tool in a process system, in which the method comprisesinformationally augmenting the process system by supplying fluid from atleast one fluid supply package as variously described herein.

In such method, the process tool may include at least onecommunicational device that is communicationally interactive with theinformational augmentation device, e.g., at least one of a quick read(QR) code and an RFID tag, on the fluid supply package to enableoperation of the process tool. The process system in which suchmethodology is carried out may be configured so that the process tool isnot operationally competent until communicational interaction of theprocess tool communicational device with the informational augmentationdevice on the fluid supply package satisfies a predetermined operationalcommunication protocol. The operational communication protocol in suchmethodology may include verification of identity of the fluid supplypackage from fluid supply package information contained in an RFID tagon the fluid supply package. The fluid supply package information maycomprise information related to the identity of fluid that is containedin the fluid supply package, process tool operating settings, processprotocols for fluid in the fluid supply package, information relating toinstallation of the fluid supply package in the process system forsupplying fluid to the process tool, or any other appropriateinformation.

The process tool utilized in such methodology may likewise be of anysuitable type, and may for example in various embodiments comprise anion implantation process tool, a chemical vapor deposition process tool,and etching tool, or any other suitable tool. The process tool in otherembodiments may comprise a tool adapted for manufacture of at least oneof semiconductor products, flat-panel displays, solar panels, LEDs, LEDdisplays, and components, subassemblies, and portions of such products.

The foregoing method may be carried out, utilizing multiple fluid supplypackages for providing a fluid or combinations of different fluids.

Consistent with the preceding discussion, the method may be carried out,in which at least one fluid supply package comprises a vessel containingphysical adsorbent on which fluid is adsorbed at subatmosphericpressure, and at least one such fluid supply package is contained in agas box that is ventilated with ventilation gas, with the process toolincluding at least one communicational device that is communicationallyinteractive with the informational augmentation device, e.g., at leastone of a quick read (QR) code and an RFID tag, on the fluid supplypackage, with the informational augmentation device on the fluid supplypackage comprising information indicative of subatmospheric pressure inthe fluid supply package vessel, and with the at least onecommunicational device being configured to receive the subatmosphericpressure information and to output a control signal for controllablyadjusting ventilation gas flow rate through the gas box in response tothe subatmospheric pressure of the fluid in the fluid supply package. Inthis manner, the ventilation rate through the gas box may besubstantially reduced to take advantage of the subatmospheric pressurefluid in the fluid supply packages, and the enhanced safety of usingsuch fluid supply packages of subatmospheric pressure fluid, as comparedto the use of conventional high-pressure gas cylinders.

Referring now to the drawings, FIG. 1 is a schematic representation ofan ion implantation system 10 utilizing informationally augmented fluidsupply packages and an informationally augmented ion implanter 12,according to one embodiment of the present disclosure.

The ion implantation process system including such fluid supply packagesand ion implantation process tool is adapted for doping of substrates,with the ion implanter 12 being arranged in receiving relationship togas supply packages 14, 16 and 18, for delivery of gas to the implanter.

The gas supply packages include a dopant gas supply package 14 includinga vessel 20 containing a dopant source gas. The gas supply package 14includes a valve head assembly 22 with a discharge port 24 joined todopant source gas feed line 44. The valve head assembly 22 is equippedwith a hand wheel 38, for manual adjustment of the valve in the valvehead assembly, to translate same between fully open and fully closedpositions for respective dispensing and storage of the dopant gas.

The dopant gas supply package 14 also includes disposed on the vessel 20a quick read (QR) code 86 and an RFID tag 92. In other embodiments, thevessel may include one of such informational augmentation devices, viz.,one of the QR code and RFID tag. In still other embodiments, the vesselmay include other informational augmentation device or devices, asadapted to directly or indirectly provide information relevant to thefluid supply package and/or its use, for access by an operator or otherindividual, or for access and utilization by a cooperative informationutilization device, processor, or assembly, to facilitate usage of thefluid supply package. The valve head assembly 22 includes a valve headinterlock 98.

Gases are also contained in gas supply packages 16 and 18, each of whichmay be constructed similarly to gas supply package 14. Gas supplypackage 16 comprises a vessel 26 equipped with a valve head assembly 28to which is coupled a hand wheel 40. The valve head assembly 28 includesa discharge port 30 to which is joined a co-flow gas feed line 52. Thegas supply package 16 also includes disposed on vessel 26 a quick read(QR) code 88 and an RFID tag 94. As mentioned above, either of suchinformational augmentation devices may be separately used in otherembodiments, or, alternatively, additional or other informationalaugmentation device(s) or device combinations may be employed. The valvehead assembly 28 also includes a valve head interlock 100.

Gas supply package 18 includes vessel 32 equipped with a valve headassembly 34 to which is coupled hand wheel 42 for translation of thevalve in the valve head assembly 34. The valve head assembly 34 includesdischarge port 36 joined to gas discharge line 60. The valve headassembly 34 includes a valve head interlock 102. A quick read (QR) code90 and an RFID tag 96 are provided on the exterior surface of the vessel32. In other embodiments, either of such QR code and RFID tag may beutilized alone. In still other implementations, other informationalaugmentation device(s) or device combinations may be employed.

In the arrangement shown, one or more dopant source gases may besupplied, or dopant source gas(es) and non-dopant gas(es), may besupplied, in any desired combinations. For example, the illustratedarrangement permits three dopant source gases, or alternatively onedopant source gas and two co-flow gases, or alternatively two dopantsource gases and one co-flow gas, to be selectively dispensed forco-flow to the mixing chamber 68. When a single dopant source gas issupplied by the gas supply package 14, the gas(es) supplied by fluidsupply packages 16 and 18 may include diluents, co-species gases,cleaning gases, stabilizing gases, or any other suitable gas(es) thatare advantageous in combination with the dopant source gas to carry outthe desired ion implantation operation. Such additional gases may beco-flow gases that are flowed contemporaneously with the dopant sourcegas to the fluid-utilizing tool, or may be gases that are utilizedseparately, e.g., cleaning gases that are periodically used to clean thedownstream flow circuitry and fluid-utilizing tool.

For the purpose of controlling flow from the respective sources, therespective gas feed lines 44, 52 and 60 are provided with flow controlvalves 46, 54 and 62 therein, respectively.

Flow control valve 46 may be equipped with an automatic valve actuator48, having signal transmission line 50 connecting the actuator to CPU78, whereby CPU 78 can transmit control signals in signal transmissionline 50 to the valve actuator, to modulate the position of the valve 46and correspondingly control the flow of gas from vessel 20 to the mixingchamber 68.

In like manner, gas discharge line 52 contains flow control valve 54coupled with valve actuator 56 that in turn is coupled by signaltransmission line 58 to the CPU 78. Correspondingly, flow control valve62 in gas discharge line 60 is equipped with valve actuator 64 coupledby signal transmission line 66 to the CPU 78.

By this arrangement, the CPU can operatively control the flow of therespective gases from the corresponding vessels 20, 26 and 32.

As an alternative to such flow control arrangement, the system mayemploy mass flow controllers in the respective lines of the flowcircuitry associated with the various gas supply packages, with the massflow controllers being arranged to receive inputs from a graphic userinterface (GUI) of a central computer or processor, or with the massflow controllers being set or adjusted based on process recipes.

In the event that gases are concurrently flowed (co-flowed) to mixingchamber 68, the resulting gas mixture is discharged to feed line 70 forpassage to the ion implanter 12.

Correspondingly, if only a single gas supply package 14, 16 or 18 isoperated in dispensing mode, the corresponding single gas then flowsthrough the mixing chamber, as modulated by the associated flow controlvalve, and is passed in feed line 70 to the ion implanter.

Feed line 70 is shown in the FIG. 1 embodiment as being coupled with abypass flow loop comprised of bypass lines 72 and 76 communicating withthe feed line, and with gas analyzer 74 disposed in the bypass flowloop. The gas analyzer 74 in this arrangement receives a side streamfrom the main flow in feed line 70, and responsively generates amonitoring signal correlative of the concentration, flow rate, etc. ofthe gas stream and transmits a monitoring signal in the signaltransmission line coupling the analyzer 74 with CPU 78. In such manner,the CPU 78 receives the monitoring signal from gas analyzer 74,processes same and responsively generates output control signals thatare sent to the respective valve actuators 48, 56 and 64, or a selectedone or ones thereof, as appropriate, to effect the desired dispensingoperation of gas to the ion implanter.

The bypass flow loop and gas analyzer shown in FIG. 1 are optionalcomponents. It will be recognized that in alternative arrangements inwhich mass flow controllers (MFCs) are employed to control feed ratesfrom any particular gas supply package, the mix ratios can be determinedand modulated without a gas analyzer.

The ion implanter 12 produces an effluent that is flowed in effluentline 80 to effluent treatment unit 82, which may treat the effluent bysuitable effluent treatment operations such as scrubbing, catalyticoxidation, etc., to generate a treated gas effluent that is dischargedfrom the treatment unit 82 in vent line 84, and may be discharged oralternatively passed to further treatment or other disposition.

Alternatively, the process system may be configured in other embodimentswith an optional bypass loop with lines 110 and 114 with gas analyzer112 disposed therebetween receiving a side stream of the exhaust flow ineffluent line 80 and responsively generating a monitoring signal in thesignal transmission line 114 coupling the gas analyzer 112 with CPU 78such that the CPU 78 can receive and monitor gas constitution andgenerate output control signals to respective valve actuators 48, 56,and 64, to thereby optimize the process and gas usage efficiency.

The CPU 78 may be of any suitable type, and may variously comprise ageneral purpose programmable computer, a special purpose programmablecomputer, a programmable logic controller, microprocessor, or othercomputational unit that is effective for signal processing of themonitoring signal and generation of an output control signal or signals,as above described.

The CPU thus may be programmatically configured to effect a cyclicoperation, e.g., concurrent flow of gases from two or all three of thesources 14, 16 and 18, or flow of the respective gases in sequence.Thus, any flow mode involving co-flow of gases, or sequential gas flows,may be accommodated.

It will therefore be recognized that doping of a substrate in the ionimplanter may be carried out in any of various manners, to utilizedopant gas singly or in combination with other gas species. It will beappreciated that the dopant gas may be variously combined with hydridegas, fluoride gas, noble gas, oxide gas, or other gas, in variousimplementations of the ion implantation system shown in FIG. 1, or inion implantation systems correspondingly configured for operation inaccordance with the disclosure.

The substrate (not shown in FIG. 1) that is disposed in the ionimplanter 12 may be of any suitable type. In various specificembodiments, the substrate can comprise a microelectronic substrate, anoptoelectronic substrate, an optical substrate, a superconductingsubstrate, a semiconducting substrate, a photovoltaic substrate, orother type of substrate. In other specific embodiments, the substratecan comprise a substrate selected from among semiconductor substrates,solar panel substrates, LED substrates, and flat panel substrates.

As discussed above, each of the fluid supply packages 14, 16, and 18shown in FIG. 1 includes a vessel that may have a quick read (QR) codeand/or an RFID tag on an outer surface of the vessel, or otherinformational augmentation device associated with the vessel. The RFIDtags may be of any suitable type, and may for example compriseread-write RFID tags including memory elements containing informationconcerning the package and/or the fluid therein. The ion implanter 12includes an associated RFID tag machine reader that is configured tocommunicate with the RFID tags 92, 94, and 96 of the respective fluidsupply package vessels 20, 26, and 32. The RFID tag machine reader 104may additionally be configured to include a processor and a radiofrequency transmitter by which information concerning the ion implanterand its operation may be transmitted from the reader 104 to the RFIDtags on the respective vessels, and/or to monitoring and/or controldevices associated with such vessels. Additionally, or alternatively,the machine reader 104 may be arranged to transmit information to theCPU 78, or alternatively to receive information from the CPU 78, formodulation of the operation of the fluid supply packages and/or the ionimplanter process tool in the ion implantation system.

In the FIG. 1 system, the fluid supply packages 14, 16, and 18, andtheir associated valving and flow circuitry are contained in gas box106. The gas box is ventilated by a ventilation gas flow therethrough.Ventilation gas is introduced by ventilation blower 120 to ventilationgas feed line 122 for flow through the interior volume of the gas boxenclosure and discharge from the gas box in ventilation gas dischargeline 124.

The process system shown in FIG. 1 may further comprise a serverassembly 811 comprising multiple server units operatively linked to arelational database 812 that can for example contain a library of ionimplantation process recipes, ion implantation process conditions,reference standards for the ion implantation operation, protocols forconducting ion implantation in the process system, historical records ofion implantation runs, and other data, accessible to the server units ofthe server assembly 811 for computational and communicationaloperations. The server assembly 811 may be located locally or remotelyin relation to the ion implantation process system comprising a gas box106 and ion implanter 12. The servers of the server assembly may bearranged in signal communication relationship with the computer 820 andsmart phone 822 of an operator or technician 810 for the ionimplantation system. Alternatively, the data and recipes may be storedlocally on a computer that is part of the ion implanter.

The communicational components of the overall process system shown inFIG. 1 may be arranged for bidirectional communication with othercommunicational components in the system, to facilitate operations ofthe ion implantation system in a simple, efficient and reliable manner.

By the process system arrangement shown, the quick read (QR) code on therespective fluid supply vessels may be scanned by the smart phone 822 ofthe operator or technician, when the smart phone is loaded with a QRcode reader application. In such manner, the QR code may be employed tolaunch a website on the smart phone 822, or on other communicationalcomponents of the system, such as computer 820, CPU 78, or serverassembly 811, or the QR code may be employed to send emails, or toinitiate other action. Thus, the QR code may act as a trigger for thesupply of information to an operator or technician. Such information mayinclude a Material Safety Data Sheet for the fluid contained in thespecific vessel, or installation instructions for the vessel enabling itto be deployed in a quick and efficient manner in the gas box 106, orinstructions for setting the parameters of the ion implanter 12 forprocessing the fluid supplied from the vessel bearing such QR code, orfor otherwise interacting with the communicational components of theprocess system, and effecting operation of the ion implantation systemand utilization of the fluid supply vessels therein. The QR code mayalso link to an application (app) on a smart phone or other processor orcomputer.

As a specific example, the QR code may launch a product specific websitefor the fluid supplied by the vessel bearing the QR code. As anotherexample, the operator or technician may not know a specific torque toapply to a connection of the fluid supply package to the associated flowcircuitry, and may scan the QR code with a smart phone, tablet, smartwatch, or other communicational device, and be directed to a websitewith a user guide containing such information. As a further example, theoperator or technician may be utilizing a specific gas mixture from therespective package vessels for the first time and may not know thecorrection factor to be applied to mass flow controllers in the flowcircuitry. In such instance, scanning the QR code may launch a webpagecontaining such information on the smart phone, computer, or otherdevice of the operator or technician. In another mode of operation,scanning the QR code may trigger transmission of an email from smartphone 822 or computer 820, to an account manager for the fluid supplierto request product information. It will be appreciated that the QR codecan be utilized for accessing information relevant to the fluid supplypackage, the fluid contained therein, the associated fluid dispensingoperation, a process operation utilizing the fluid, and/or settings,calibrations, correlations, etc. for the process equipment in theassociated process system. The resulting information transmitted to theoperator or technician may be of any suitable type, and may include datasheets, application notes, user guides, recommended process recipes,etc.

Thus, the fluid supply packages 14, 16, and 18 in the FIG. 1 system mayinclude RFID tags on the respective vessels, and as indicated, such tagsmay be of a read/write character. Such tags may interact with the tagmachine reader 104 on the ion implanter 12, so that the tag machinereader recognizes which fluid supply packages are installed in each gasstick of the gas supply flow circuitry, and correspondingly optimizesthe performance of the ion implantation system.

For example, the tag machine reader 104 may read the tags 92, 94, and 96of the respective fluid supply packages and thereby confirm that allsuch vessels are of a type containing solid-phase physical adsorbent inthe respective vessels holding fluid at subatmospheric pressure. Inconnection with such confirmation of the presence of subatmosphericpressure fluid supply packages, the machine reader 104 may responsivelytransmit an output control signal to reduce the volumetric flow rate ofventilation gas flowed through the gas box 106, e.g., by a controlsignal that turns down the blower 120 feeding ventilation gas to the gasbox, and/or that partially closes flow control valves (not shown) in theventilation gas feed line 122 and ventilation gas discharge line 124,respectively, thereby taking advantage of the energy savings that resultfrom use of such low pressure fluid supply packages, which do notrequire the high throughput ventilation gas flow rates that are neededto ensure safety when high-pressure gas cylinders containing fluid atpressure of 1000-2000 psi (6.9 MPa-13.8 MPa) are employed.

As another example, the tag machine reader 104 may read the tags 92, 94,96 of the respective fluid supply packages and correspondingly set alarmlimits of toxic gas monitor(s) (not shown) mounted in the gas box 106,based on the type of gas being supplied from the fluid supply packagesin the gas box.

As a still further example, the information contained in the RFID tag onthe vessel may be monitored by the tag machine reader 104 and includethe amount of fluid in the cylinder, and such fluid inventory readingcan then be used to generate a correlative signal to a monitoring andcontrol system, to track fluid usage based on flow rate and to predictthe endpoint of active dispensing operation for the specific fluidsupply packages. This would assist operators or technicians to ensurethat fluid supply packages are taken off-stream at the appropriate timeand that the total inventory of fluid in the fluid supply packages isutilized.

Tagging of the vessels of the fluid supply packages in accordance withthe present disclosure has the further benefit that tracking of fluidsupply packages is facilitated, a significant advantage since thousandsof industrial gas packages are in inventory and transit locations offluid-utilizing facilities at any given time. The RFID tagging and QRcoding thus can be employed to track specific types of fluid in anoverall inventory of packages of many different fluids. Further, suchtagging and coding can assist in remotely monitoring pressures of gas inspecific fluid supply packages, and to confirm the identity of fluid inspecific packages.

In specific embodiments, the tagging may comprise low-cost sensorpatches that can be affixed to the vessel of the fluid supply package.The patch may contain RFID chips that utilize ISO14443a, b, or ccommunication protocols, or other protocols as necessary or desirable ina given application. The 14443 standard incorporates power transmissionto the chip in order to operate it and the peripheral sensor chips. Theincoming AC signal, which contains both data and power, is rectified andcharge is stored in either on-chip or in-package capacitor(s). Operationusing remote power is preferred in order to avoid battery requirements,and to achieve a highly cost-effective system. The RFID tag may containnon-volatile memory to store data on the storage history of the package,the transportation history of the package, etc. Sensor patches can beemployed for sensing pressure of the fluid in the vessel, and suchpressure can be employed with acoustic measurements at the surface ofthe vessel, e.g., by utilizing a H2M monitor (Entegris Corporation,Billerica, Mass., USA) for acoustic measurements in a wave guide cell,to verify the identity of the fluid in the package.

The fluid supply packages 14, 16, and 18 of the FIG. 1 system haverespective valve heads 22, 28, and 34 featuring respective valve headinterlocks 98, 100, and 102, which are arranged in communicationrelationship with the machine reader 104 associated with the ionimplanter 12. By this configuration, the machine reader 104 can readinformation from the RFID tags 92, 94, 96 of the respective fluid supplypackages, and verify that such fluid supply packages are appropriatelycoupled to flow circuitry for flow of the corresponding fluids to theion implanter for the specified operation. The machine reader thenresponsively transmits a signal to the valve head interlocks 98, 100,and 102 on the respective fluid supply vessels, to unlock suchinterlocks and thereby open the valve head in each instance to the flowof fluid from the vessel through the valve head to the associated flowcircuitry. Thus, the interlocks are maintained in a locked conditionuntil signaled by the machine reader associated with the ion implanter12.

This arrangement provides a highly effective “fail-safe” arrangement forensuring that the specific fluid supply packages and specific processtool are interconnected with one another, and that the process toolcannot be operated without the specific fluids that are appropriate forperformance of the desired process operation, e.g., in the manufactureof semiconductor product articles, solar panels or solar cells, LEDs,LED displays, flat panel displays, or components, subassemblies orportions of such products.

This arrangement also provides a highly effective enhanced safetyarrangement for transport and storage of the specific fluid supplypackages, by ensuring that the fluid supply packages are located in anapproved gas box, coupled to an appropriate process tool, or back at asupply manufacturing facility for refill before valve head interlocks98, 100, and 102 on the respective fluid supply vessels are unlocked andvalves are opened to allow fluid flow.

Accordingly, the informational augmentation of the fluid supply packagesand process tools in accordance with the present disclosure achievesenhanced efficiency in the installation and supply of fluids from fluidsupply packages and in the operation of the associated fluid-utilizingprocess tools. The informational augmentation components can beconfigured in a wide variety of configurations, to effect computationaland communicative operations, e.g., by bidirectional transmission andreceipt of data and signal communications, and such communications maybe effected utilizing a worldwide communications network such as theInternet, or other network.

The servers in the server assembly 811 of the FIG. 1 system may bearranged to process the communicated information generated in thesystem, in any suitable manner. For example, the servers may effect analgorithmic comparison of fluid information with reference standards andprovide comparison data to the CPU 78, computer 820, smart phone 822, orother communication devices or components in the system.

FIG. 2 is a schematic representation of a process system 300 includingan informationally augmented fluid supply package configured fordelivery of gas, in accordance with another embodiment of the presentdisclosure.

As illustrated in FIG. 2, the fluid supply package includes a fluidstorage and dispensing vessel 302 having joined to its upper end a valvehead 304 coupled with a pneumatic valve actuator 306. The valve head iscoupled to a VCR fitting 308, which in turn is coupled with flow conduit312. Flow conduit 312 communicates with the pressure transducer 310, aswell as the check valve 314 and nitrogen purge inlet 316. The nitrogenpurge inlet is employed for introduction of nitrogen or other purge gasfor clearance of the dispensing assembly flow passages and passages ofthe associated flow circuitry, for subsequent dispensing of gas fromvessel 302.

Flow conduit 312 has disposed therein a flow control valve 307, a spangauge 320, a mass flow controller 322, and a flow control valve 309. Theflow conduit 312 also is coupled in flow circuit-forming relationship tothe bypass conduit 325 having by-pass valve 324 therein. The flowconduit 312 is joined at its right hand end as shown, to a gas boxmanifold conduit 326. Conduit 326 has valve 311 positioned therein, andhas a coupling 330 opposite the end communicating with the gas boxmanifold, for coupling of the fluid storage and dispensing package witha downstream fluid-utilizing process tool, such as an ion implantationtool, a chemical vapor deposition tool, and etching tool, or other tool.It will be recognized that this flow circuitry can be variouslyconfigured, and in other embodiments the valves 307 and 309 may beconstituted as simple shut-off valves or flow access valves, and/or thecomponent 322 may, instead of being a mass flow controller, be a massflow meter that is configured to sense flow and to responsively transmita signal for modulation of a flow control valve in the flow circuitry.

In operation, gas from the fluid storage and dispensing vessel 302 isflowed in flow conduit 312 and gas box manifold conduit 326 to thedownstream fluid-utilizing process tool, at a controllable rate, ascontrolled by mass flow controller 322. The pressure transducer 310 maybe operatively coupled to mass flow controller 322, as well as to otherelements, e.g., valves, in the flow circuit, to carry out the dispensingof the gas for flow to the fluid-utilizing process, in a suitablemanner.

As shown in FIG. 2, the fluid storage and dispensing vessel 302 hasdisposed on its external surface a QR code 350 and an RFID tag 352. TheVCR fitting 308 is provided with a valve coupling interlock mechanism362 therein, which prevents coupling of the flow conduit 312 to thevalve head 304 of the fluid supply package unless the machine reader ona downstream process tool reads the information contained in the RFIDtag 352 and verifies that the fluid supply package is appropriate foroperation therewith, whereupon the machine reader (not shown in FIG. 2)transmits a signal to the valve coupling interlock mechanism 362 tounlock the fitting so that it can be connected to the valve head 304 ofthe fluid supply package.

A further interlock mechanism is provided on the valve head 304, in theform of the valve head dispensing interlock mechanism 364, whichlikewise requires an actuating signal to be transmitted from the machinereader on the process tool to enable the valve in the valve head to beunlocked for dispensing operation. This provides a further fail-safeaspect of the fluid supply package usage.

Alternatively, or additionally, an interlock mechanism 372 may beprovided on the flow control valve 307, whereby such flow control valveis unlocked by an actuating signal transmitted from the machine readeron the process tool.

It will therefore be appreciated that the process system may be providedwith any appropriate number and types of interlock mechanisms, tocooperatively integrate the fluid supply package operation with theprocess tool operation, and to ensure that the appropriate fluids andfluid supply packages are being employed for process tool operation.

While the disclosure has been set forth herein in reference to specificaspects, features and illustrative embodiments, it will be appreciatedthat the utility of the disclosure is not thus limited, but ratherextends to and encompasses numerous other variations, modifications andalternative embodiments, as will suggest themselves to those of ordinaryskill in the field of the present disclosure, based on the descriptionherein. Correspondingly, the disclosure as hereinafter claimed isintended to be broadly construed and interpreted, as including all suchvariations, modifications and alternative embodiments, within its spiritand scope.

What is claimed is:
 1. A fluid supply package comprising a fluid storageand dispensing vessel including a solid-phase physical adsorbentcontained therein; a fluid dispensing assembly coupled to the vessel andconfigured to enable discharge of fluid from the vessel under dispensingconditions; and an informational augmentation device disposed on thefluid storage and dispensing vessel.
 2. The fluid supply package ofclaim 1, wherein the informational augmentation device comprises atleast one of a quick read (QR) code and an RFID tag.
 3. The fluid supplypackage of claim 1, wherein the informational augmentation devicecomprises an RFID tag.
 4. The fluid supply package of claim 3, whereinthe RFID tag comprises a tag selected from the group consisting of: anactive reader passive tag (ARPT); a passive reader active tag (PRAT);and an active reader active tag (ARAT).
 5. The fluid supply package ofclaim 3, wherein the RFID tag comprises a thermally-resistive RFIDdevice that is effective to provide an output indicative of temperatureof fluid in the fluid supply package.
 6. The fluid supply package ofclaim 1, wherein the informational augmentation device is readable by amachine reader to initiate accession of a website, display of a webpage,transmission of an email, or other telecommunication action providinginformation related to the fluid supply package, a fluid packagedtherein, or use of the fluid supply package or fluid.
 7. The fluidsupply package of claim 1, further comprising an interlock structureconfigured to preclude fluid dispensing from the fluid storage anddispensing vessel unless unlocked by an unlocking signal requiring forits generation information from the informational augmentation device.8. The fluid supply package of claim 7, wherein the informationalaugmentation device comprises a quick read (QR) code, and the interlockstructure is unlockable by an unlocking signal requiring informationfrom the quick read (QR) code for its generation.
 9. The fluid supplypackage of claim 7, wherein the informational augmentation devicecomprises an RFID tag, and the interlock structure is unlockable by anunlocking signal requiring information from the RFID tag for itsgeneration.
 10. The fluid supply package of claim 1, wherein the solidphase physical adsorbent is selected from a group consisting of carbonadsorbent, zeolite, molecular sieve adsorbent, metal organic framework(MOF), aerogel, alumina, silica, aluminosilicate, porous metal oxide,and combinations of two or more of the foregoing.
 11. The fluid supplypackage of claim 1, wherein the solid phase physical adsorbent includesmetal organic framework (MOF).
 12. The fluid supply package of claim 1,wherein the solid phase physical adsorbent includes carbon adsorbent.13. A process system comprising the fluid supply package of claim 1.